Inspecting, Patterning EUV Masks
posted on November 16, 2019 16:01
EUV mask inspection is a critical part of the mask making process for extreme ultraviolet (EUV) lithography. During the process flow, defects or particles can crop up on the EUV mask. If the defects aren’t found and removed, the defect image may print on the wafer, thereby impacting chip yields or causing failures.
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