Rebirth of mask process correction for better wafer lithography
posted on July 29, 2013 18:05
Who knew that mask process correction (MPC) would again become necessary for the manufacturing of deep ultraviolet (DUV) photomasks? MPC can be called a seasoned technology; it has always been an integral part of the e-beam mask writers to cope with the e-beam proximity effects, which can extend up to 15um of the exposure point.
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