ASML Revs EUV Engines
posted on March 05, 2017 16:03
SAN JOSE, Calif. — ASML unveiled the NXE:3400B, the extreme ultraviolet lithography scanner that it hopes makes it into volume-production fabs, and gave the first close-up look at its follow-on. At the same event, Carl Zeiss and Samsung described high-resolution systems to inspect masks at the same wavelength as EUV light.
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